We offer a unique range of equipment solutions, support
services and technical expertise to meet application needs in the
manufacture of microelectronic devices, including silicon and
We continue to innovate leading technology solutions which
will improve your process up-time, yield, throughput and safety
compliance whilst striving to balance the often conflicting
requirements of lower cost of ownership through reduced
environmental emissions and extended product lifetimes with a
reduction in on-going service costs.
Serving all leading process tool OEMs and with a presence at every
major semiconductor fab in the world, our systems are designed to
meet the specific requirements of existing and developing processes.
A variety of systems, such as dry vacuum pumps, turbomolecular
pumps and point-of-use abatement systems are offered to optimise
performance across the range of applications, from light duty to the
heaviest duty processes.
Our product ranges include:
– Dry, remote, on-tool and near-tool vacuum pumps
– Turbomolecular pumps
– Exhaust management systems
– Liquid abatement
– Integrated vacuum and abatement systems
– Chemical blend and dispense systems
– Wet process solutions – cleaning and etching Equipment
Arena’s business-to-business events offer a myriad of opportunities for sponsors and exhibitors to drive their businesses forward.
Our sponsorship packages help companies educate ther target market on key industry issues and spread brand awareness throughout the
If you want to discuss how we can help you generate leads and add-value to your corporate and brand image please contact:
+44 (0)20 7936 6948